| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily determine the quality of the suction holding performance of a chuck table. <P>SOLUTION: The chuck table inspection device 1 inspects a bonded state in a chuck table 9 configured by bonding a base 90 to a porous member 91. An inspection ball 500 is made to fall toward the porous member 91 of the chuck table 9 from an inspection ball holding section 50 and the spring-up of the inspection ball 500 in the porous member 91 is monitored by a monitoring sensor 81. The quality of the suction holding performance of the chuck table 9 is determined depending on whether or not the spring-up of the inspection ball 500 becomes higher than the monitoring sensor 81. The quality of the suction holding performance of the chuck table 9 can be properly determined and the accurate determination is made possible since the determination is hardly affected by a temperature and humidity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
