摘要 |
<P>PROBLEM TO BE SOLVED: To suppress fluctuation in power supply voltage. <P>SOLUTION: A main power supply performs feedback control so that potential of a power supply terminal P1 of DUT (device under test) 1 approximates to prescribed target value. To a control terminal P<SB POS="POST">CNT</SB>, a current control signal S<SB POS="POST">CNT</SB>for instructing a target waveform REF of compensating current to be generated by a compensation power supply is inputted. A current detection circuit 22 generates a detection signal V<SB POS="POST">CS</SB>in accordance with current I<SB POS="POST">L</SB>flowing an inductor L1. A pulse modulator 24 compares the detection signal V<SB POS="POST">CS</SB>with the target waveform REF in accordance with the current control signal S<SB POS="POST">CNT</SB>and generates a pulse signal Sp whose level changes in accordance with a result of comparison. A driver 26 compensationally switches a first switch SW1 and a second switch SW2 on the basis of the pulse signal Sp. <P>COPYRIGHT: (C)2013,JPO&INPIT |