| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat acceleration sensor which is capable of high-accuracy triaxial acceleration measurement. <P>SOLUTION: A triaxial acceleration sensor comprises a measuring space, a plurality of heating means and a plurality of temperature measuring means. A plurality of substrates having through holes comprised of slopes formed by anisotropic etching of a single-crystal silicon substrate and a plurality of substrates having slopes with recesses formed by anisotropic etching of a single-crystal silicon substrate are laminated and the measuring space is formed from the through holes and the recesses. In the measuring space, the plurality of heating means and the plurality of temperature measuring means are positioned while being formed integrally with any substrates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
