| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape inspection method for securing high measurement accuracy regardless of a shape of a measuring object by complementarily combining a plurality of three-dimensional shape measurement methods and surface measurement methods, and its device. <P>SOLUTION: A three-dimensional shape inspection device includes: a storage part for storing reference data which is shape data of a reference model of an inspection object; an area specifying part for specifying an area to acquire first shape data from the reference data; a first three-dimensional shape sensor for acquiring the first shape data for the area specified in the area specifying part; a second three-dimensional shape sensor for acquiring second shape data different from the first shape data of the inspection object for an area other than the area specified in the area specifying part; and a complementary integration part for integrating the first shape data and the second shape data. <P>COPYRIGHT: (C)2013,JPO&INPIT |
