| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that it is difficult to optically detect a two-dimensional position of an object with one apparatus. <P>SOLUTION: An optical position detection apparatus comprises a light irradiation section which irradiates an object with light, and a light receiving section which receives reflection light from the object. The light receiving section includes a divided photodiode of which the light receiving plane is divided in a two-dimensional manner, a light receiving lens which converges reflection light from the object to form an image of the object on the light receiving plane of the divided photodiode, and an arithmetic section which detects a position of the object in a two-dimensional direction which is orthogonal to an optical axis of the light receiving lens on the basis of output signal currents of the photodiode corresponding to the divided light receiving planes of the divided photodiode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
