| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new cutting plane detection method capable of easily and accurately distinguishing a cutting plane by reducing the load of image processing. <P>SOLUTION: A first image is acquired by turning a polarization direction 2a of a first polarization filter 2 in a predetermined direction to make the polarization direction 2a of the first polarization filter 2 and a polarization direction 4a of a second polarization filter 4 perpendicular to each other, making illumination light 1 transmit the first polarization filter 2 to be reflected on cutting planes 3b and 3c of a sample 3, then making the illumination light transmit the second polarization filter 4 to be photographed by a digital camera 5. A second image is acquired by tilting the polarization direction 2a of the first polarization filter 2 by 45 degrees from a predetermined direction, and a third image is acquired by making the polarization direction 2a of the first polarization filter 2 parallel with the polarization direction 4a of the second polarization filter 4. The first, second and third images are added. <P>COPYRIGHT: (C)2013,JPO&INPIT |
