发明名称 MAGNESIUM VAPOR DEPOSITION METHOD, METHOD FOR MANUFACTURING MAGNESIUM PELLET FOR VAPOR DEPOSITION, AND MAGNESIUM PELLET FOR VAPOR DEPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a magnesium vapor deposition method in which bumping of magnesium pellets for vapor deposition is prevented, and the consistent vapor deposition rate is maintained. <P>SOLUTION: The magnesium vapor deposition method includes an exposure step of exposing a part or the entire part of magnesium lump of encapsulated pellets having the magnesium lump and a magnesium oxide film for covering the surface of the lump, and a vapor deposition step of depositing magnesium on a body for deposition by heating the pellets obtained through the exposure step. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013087356(A) 申请公布日期 2013.05.13
申请号 JP20110232015 申请日期 2011.10.21
申请人 NITTO DENKO CORP 发明人 KAKIUCHI RYOHEI;YAMAMOTO SATORU;HIDA KANAKO
分类号 C23C14/24 主分类号 C23C14/24
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