| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow controller capable of controlling flow rate to a plurality of gas types without performing a complicated operation. <P>SOLUTION: In a flow controller 30 which controls flow rate of gas flowing to a gas passage 28, it includes: a main gas pipe 50; flow detection means 52 for detecting flow rate of the gas flowing to the main gas pipe 50 to output a flow rate signal; a flow rate control valve mechanism 54 which controls the flow rate; a conversion data storage part 56 which stores a plurality of pieces of conversion data corresponding to a plurality of gas types for representing relation between a flow rate instruction signal Sb to be input from the outside and target flow rate; and a flow control body 58 which selects the corresponding conversion data from the plurality of pieces of conversion data on the basis of a gas type selection signal Sa to be input from the outside and calculates the target flow rate on the basis of the flow rate instruction signal Sb, and controls the flow rate control valve mechanism on the basis of the target flow rate and the flow rate signal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
