| 摘要 |
<p>PURPOSE: An in-line type substrate process system and a loadlock chamber are provided to reduce process time by omitting a process for changing the pressure of a loadlock chamber as a tray is transferred to the loadlock chamber. CONSTITUTION: A chamber body(10) comprises a loading station, a first gate(11) for transferring a tray, and a second gate(12) for transferring the tray and a process chamber. A susceptor(20) moves up and down in the chamber body. A mounting unit loads the tray in a position separated from the upper surface of the susceptor. The mounting unit comprises a drive part(32) and a slot(31) including a first mounting member(311) and a second mounting member(312). The drive part changes a gap between the first mounting member and the second mounting member.</p> |
