| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such the problem that when the upper position of a scribing head is defined as an origin when detecting a distance to a substrate on a scribing device etc., the origin positions are different by scribing devices, and a common recipe table can not be generated. <P>SOLUTION: A distance d1 to a table is calculated using a non-contact sensor, a distance d2 to a reference block is calculated, and the difference Δd is held. The scribing head is lowered to abut against the reference block, and the difference between a cutting edge and the table is detected to represent the position of the scribing head with the top surface of the table as a zero-point position. Consequently, a recipe table in which a scribing method including a thickness of the substrate with the top surface of the table as the zero point is described is generated to perform scribing processing on a brittle material substrate of the same kind regardless the types of the scribing devices. <P>COPYRIGHT: (C)2013,JPO&INPIT |
