| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact terminal for a probe card capable of preventing occurrence of oxidation and erosion. <P>SOLUTION: On a base 11 of a probe card 10 for inspecting a semiconductor device, a plurality of pogo pins 12 are arranged on a surface opposed to the semiconductor device, a plunger 14 of each pogo pin 12 has a columnar contact part 14c and the contact part 14c includes a columnar center part 14d and an outer cylinder 14e covering the side face of the center part 14d. The hardness and specific resistance of a material composing the outer cylinder 14e are different from the hardness and specific resistance of a material composing the center part 14d. <P>COPYRIGHT: (C)2013,JPO&INPIT |
