| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity detector for reducing the occurrence of a drift of a pressure detection value due to high temperature processing of reflow or the like, and the manufacturing method thereof. <P>SOLUTION: A support frame part 206 of a diaphragm layer 20 of a pressure sensor 1 and a stationary part are connected by using a first bonding material 40, and a pair of base parts 16b of a pressure sensitive layer 10 and a pair of support parts 210 are connected by using a second bonding material 50 having a melting point higher than a melting point of the first bonding material 40. <P>COPYRIGHT: (C)2013,JPO&INPIT |
