| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film peeling device which suppresses impact when peeling an edge portion of a protective film adhered to a plate-like member such as a substrate, thereby preventing a breakage of the substrate and a breakdown of the device, and also facilitates switching on a lot-by-lot basis. <P>SOLUTION: A film peeling device includes: a roller unit 17 having a pair of support members 20 and 21 configured to support a standard pressure roller 15 and an inclined pressure roller 16; and width-direction movement means for moving the roller unit 17 in a width direction of a plate-like member. The width-direction movement means includes: an operation unit 28 that moves the roller unit 17 to an optional position along support rail members 27 and 27; and a control unit to control the operation unit 28. <P>COPYRIGHT: (C)2013,JPO&INPIT |
