| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scan chain inspection device and inspection method capable of suitably performing scan chain inspection. <P>SOLUTION: A scan chain inspection device 1A comprises: an inspection signal supply part 18 for supplying an inspection signal to a scan chain of a semiconductor device 10; a register measurement part 20 for measuring a time change of a signal level of an inspection signal at each register of the scan chain; and an inspection analyzer 50 having a register number analysis part 51 for giving a register number to each register on the basis of a measurement result by the measurement part 20. The supply part 18 supplies m kinds of inspection signal strings whose signal lengths n are different. The analysis part 51 performs grouping for dividing a plurality of registers of the scan chain into n groups from a measurement result using an inspection signal string of the signal length n about each of the m kinds of inspection signal strings, and gives a register number to each register on the basis of the result. <P>COPYRIGHT: (C)2013,JPO&INPIT |
