发明名称 METHOD AND APPARATUS FOR IDENTIFYING AND CORRECTING SPHERICAL ABERRATION IN MICROSCOPE IMAGING BEAM PATH
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and apparatus for identifying and correcting spherical aberrations in a microscope imaging beam path. <P>SOLUTION: There is provided a method for identifying a spherical error of a microscope imaging beam path (7) in a context of microscopic imaging of a sample (9) using a microscope (1) having an objective (10) and a coverslip (2) which carries or covers the sample (9) placed in the imaging beam path. A measurement beam (130) is guided in decentered fashion, outside an optical axis (8) of the objective (10), through the objective (10) onto the sample (9). A measurement beam (132) reflected at an interface (116) between the sample (9) and the coverslip is guided through the objective (10) onto a detector (128). The detector (128) acquires an intensity profile of the reflected measurement beam (132), and the presence of a spherical error is determined qualitatively and/or quantitatively from the intensity profile. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013088809(A) 申请公布日期 2013.05.13
申请号 JP20120224044 申请日期 2012.10.09
申请人 LEICA MICROSYSTEMS CMS GMBH 发明人 KNEBEL WERNER;TOBIAS BAUER;EUTENEUER PETER
分类号 G02B21/00;G02B7/28;G02B7/32 主分类号 G02B21/00
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