发明名称 |
METHOD AND APPARATUS FOR IDENTIFYING AND CORRECTING SPHERICAL ABERRATION IN MICROSCOPE IMAGING BEAM PATH |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for identifying and correcting spherical aberrations in a microscope imaging beam path. <P>SOLUTION: There is provided a method for identifying a spherical error of a microscope imaging beam path (7) in a context of microscopic imaging of a sample (9) using a microscope (1) having an objective (10) and a coverslip (2) which carries or covers the sample (9) placed in the imaging beam path. A measurement beam (130) is guided in decentered fashion, outside an optical axis (8) of the objective (10), through the objective (10) onto the sample (9). A measurement beam (132) reflected at an interface (116) between the sample (9) and the coverslip is guided through the objective (10) onto a detector (128). The detector (128) acquires an intensity profile of the reflected measurement beam (132), and the presence of a spherical error is determined qualitatively and/or quantitatively from the intensity profile. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013088809(A) |
申请公布日期 |
2013.05.13 |
申请号 |
JP20120224044 |
申请日期 |
2012.10.09 |
申请人 |
LEICA MICROSYSTEMS CMS GMBH |
发明人 |
KNEBEL WERNER;TOBIAS BAUER;EUTENEUER PETER |
分类号 |
G02B21/00;G02B7/28;G02B7/32 |
主分类号 |
G02B21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|