| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light detection device which can restrain temporal resolution from becoming different between pixels and also can further improve temporal resolution. <P>SOLUTION: A semiconductor photodetector 10 includes a plurality of avalanche photodiodes APD operating in Geiger mode and formed in a semiconductor substrate 1N, a quenching resistor R1 connected in series to each of the avalanche photodiodes APD and disposed on a principal plane 1Na side of the semiconductor substrate 1N, and a plurality of through electrodes TE electrically connected to the quenching resistor R1 and formed through the semiconductor substrate 1N from the principal plane 1Na side to a principal plane 1Nb side. A mounting substrate 20 includes a plurality of electrodes E9 which are disposed on a principal plane 20a side corresponding one for one to each of the through electrodes TE. The through electrodes TE and the electrodes E9 are electrically connected via a bump electrode BE. A side face 1Nc of the semiconductor substrate 1N and a side face 30c of a glass substrate 30 are made to be flush with each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
