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发明名称
薄膜制备装置
摘要
一种薄膜制备装置,包括有一基座、一偏摆驱动机构、以及一承载盘。该基座具有一可旋转的支撑轴;该偏摆驱动机构具有一可随该支撑轴旋转的固定座、一可受该固定座带动而进行圆周运动的轨道、以及一可沿该轨道而轴向往返位移的支撑体;该承载盘系枢设于该支撑轴且其底面抵靠于该支撑体,如此,该承载盘可随该轨道的圆周运动以及该支撑体的轴向运动而相对一水平面倾斜偏摆。藉此,透过该承载盘的倾斜偏摆,可使置放于其上之基板顶面的待成膜化学溶液均匀分布于该基板顶面,从而于该基板顶面形成均匀度佳的薄膜。
申请公布号
TWM452964
申请公布日期
2013.05.11
申请号
TW101225577
申请日期
2012.12.28
申请人
生阳新材料科技有限公司 萨摩亚
发明人
曾昭隆;何文福;陈官璧;邱文鼎;赵子铭;孟良;黄世壬;奚明
分类号
C23C16/00
主分类号
C23C16/00
代理机构
代理人
刘绪伦 台中市南屯区永春东一路549号3楼
主权项
地址
萨摩亚
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