STOCKER SYSTEM

摘要

PURPOSE: A stocker system is provided to solve problems caused by the dropping of masks in a gravity direction while the masks are horizontally transferred and stored. CONSTITUTION: A stocker system comprises a mask loading part(100), a draw-in and draw-out port(200), and a stocker(300). Masks are erectly loaded in the mask loading part. The draw-in and draw-out port is arranged close to the mask loading part and has a mask draw-in and draw-out unit moving in a direction that the masks are loaded. The stocker is arranged to move around the mask loading part and the mask draw-in and draw-out unit. The stocker grips the masks in the erected state to transfer the masks to the mask loading part or the mask draw-in and draw-out unit.