发明名称 TRANSISTOR, TRANSISTOR MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE INCLUDING SUCH TRANSISTOR
摘要 Provided are a transistor (100), a transistor manufacturing method and a semiconductor device including said transistor. The transistor manufacturing method includes: providing a substrate (101) and forming a first insulation layer on the substrate (102); defining a first device area on the first insulation layer (103); forming a side-wall isolator surrounding the first device area on the first insulation layer (106); defining a second device area on the first insulation layer (107), with the second device area being isolated from the first device area via the side-wall isolator; and respectively forming a transistor structure in the first device area and the second device area. The transistor manufacturing method reduces the space required for isolation, reducing process complexity and lowering manufacturing costs.
申请公布号 WO2013063728(A1) 申请公布日期 2013.05.10
申请号 WO2011CN01998 申请日期 2011.11.30
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;LIANG, QINGQING;ZHONG, HUICAI;ZHU, HUILONG 发明人 LIANG, QINGQING;ZHONG, HUICAI;ZHU, HUILONG
分类号 H01L21/331;H01L29/735 主分类号 H01L21/331
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