TRANSISTOR, TRANSISTOR MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE INCLUDING SUCH TRANSISTOR
摘要
Provided are a transistor (100), a transistor manufacturing method and a semiconductor device including said transistor. The transistor manufacturing method includes: providing a substrate (101) and forming a first insulation layer on the substrate (102); defining a first device area on the first insulation layer (103); forming a side-wall isolator surrounding the first device area on the first insulation layer (106); defining a second device area on the first insulation layer (107), with the second device area being isolated from the first device area via the side-wall isolator; and respectively forming a transistor structure in the first device area and the second device area. The transistor manufacturing method reduces the space required for isolation, reducing process complexity and lowering manufacturing costs.
申请公布号
WO2013063728(A1)
申请公布日期
2013.05.10
申请号
WO2011CN01998
申请日期
2011.11.30
申请人
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;LIANG, QINGQING;ZHONG, HUICAI;ZHU, HUILONG