发明名称 |
LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM |
摘要 |
<p>The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.</p> |
申请公布号 |
WO2013066899(A1) |
申请公布日期 |
2013.05.10 |
申请号 |
WO2012US62624 |
申请日期 |
2012.10.30 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ZHUANG, GUORONG VERA;KRISHNAN, SHANKAR;DE VEER, JOHANNES D.;FLOCK, KLAUS;WANG, DAVID Y.;ROTTER, LAWRENCE D. |
分类号 |
G01N21/01;G01N21/88 |
主分类号 |
G01N21/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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