BI-DIRECTIONAL ASSOCIATION AND GRAPHICAL ACQUISITION OF TIME-BASED EQUIPMENT SENSOR DATA AND MATERIAL-BASED METROLOGY STATISTICAL PROCESS CONTROL DATA

摘要

A method and system for linking sensor data to metrology data and metrology data to sensor data is described herein. In one embodiment, a user selection of metrology data for a product is received, related process tool fault detection summary for the selected metrology data for the product is presented, a user selection of a process tool from the process tool fault detection summary is received, and related fault detection details for the selected process tool are presented.