COMPOSITE DEVICE AND ROBOT HAND DRIVE CONTROL DEVICE

摘要

A composite device comprises: a substrate (12) provided with a fixed section (14), a recessed section (16) and a membrane (18) that spans this recessed section (16); and a plurality of piezoelectric elements (30) provided with a lower electrode (32), a piezoelectric film (34) and an upper electrode (36). Some of the piezoelectric elements (30) have a projection (38) formed on the upper electrode (36); these aforementioned piezoelectric elements (30) provide perpendicular pressure detection elements (40). The plurality of piezoelectric elements (30) are further provided with ultrasonic elements (42, 74) separate from the aforementioned perpendicular pressure detection elements (40). The ultrasonic elements (42, 74) are provided at least on the recessed section (16) of the substrate (12) in the horizontal direction.