GAS NOZZLE, PLASMA DEVICE USING SAME, AND METHOD FOR MANUFACTURING GAS NOZZLE

摘要

[Problem] To provide a gas nozzle that responds to the need to reduce particle detachment. [Solution] A gas nozzle (4) according to an embodiment of the present invention is characterized in being provided with a columnar body (13) comprising a ceramic sintered body in which a through-hole (12) allowing gas to flow is formed, a gas exhaust opening (15) of the through hole (12) being formed in one end surface (S1) of the body (13), and the average length (Rsm) of a contour curve element at the end surface (S1) being at least 5 times the average crystal grain size in the ceramic sintered body.