| 摘要 |
PURPOSE: A device for cleaning the rear surface of a carrier substrate including a flexible film is provided to reduce the loss of cleaning solution by spraying only when the substrate is transferred by a sensor. CONSTITUTION: A device for cleaning the rear surface of a carrier substrate(10) including a flexible film comprises a plurality of transfer rollers(11), a PVA(PolyVinyl Alcohol) sponge roller(13), a liquid fold roller(14), a plurality of upper rollers(15), a side air nozzle, and a rotary air nozzle(17). The rotary air nozzle is installed toward the direction perpendicular to the transfer direction of the carrier substrate. The penetration of a cleaning solution an upper part of the substrate is prevented from the front end and the rear end during transferring of the carrier substrate by varying each of supply direction of air by a signal of a sensor.
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