LITHOGRAPHIC APPARATUS AND METHOD OF COOLING COMPONENT IN LITHOGRAPHIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus with a cooling system.

SOLUTION: A lithographic apparatus includes a component and a local cooler to apply a local cooling load to the component. The local cooler has a gas passageway, which includes a flow restrictor upstream of the component and is configured to direct a flow of gas exiting from the flow restrictor to cool a surface of the component.

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