| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump, in which a liquid content is not mixed (entry) into a bearing part with a simple structure and in which a failure due to poor bearing operation is not generated. <P>SOLUTION: In a vacuum pump, which includes: a pump part P provided with a pair of pump rotors 11 mounted to two parallel rotary shafts 32, respectively, and a pump casing 12 for housing the pair of pump rotors therein; and a motor part M for rotating and driving the rotary shafts 32, and which discharges gas contained in the space between the pair of pump rotors 11 and the pump casing 12 by transferring the gas, the rotary shaft 32 is rotatably supported only by bearings 34, 35 disposed at both sides across a motor stator 30 of the motor part M or only by two bearings disposed between the motor part and the pump part. A suction port 15 and a discharge port 16 are provided at a motor part-side end and an anti-motor part-side end of the pump casing 12, respectively, and the gas is transferred in a direction away from the motor part M. <P>COPYRIGHT: (C)2013,JPO&INPIT |
