| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement system and a monitoring method that can synchronize or time-correlate measurement results of parameters from various positions. <P>SOLUTION: A measurement system comprises a plurality of sensor channels and high-frequency couplers 70 and 72. Each of the plurality of sensor channels generates an output signal on the basis of electric properties of high-frequency power at one of plural positions in a circuit, and includes a probe 20 for generating a first signal on the basis of the electric properties of the high-frequency power, an oscillator 62 for generating periodic signals, and mixers 64 for mixing the first signal and the periodic signals in order to generate the output signal for the sensor channel. The high-frequency couplers 70 and 72 generate second output signals on the basis of the plurality of output signals from the sensor channels. <P>COPYRIGHT: (C)2013,JPO&INPIT |
