METHOD OF MANUFACTURING PLATE WITH PASSAGE, PLATE WITH PASSAGE, TEMPERATURE ADJUSTMENT PLATE, COLD PLATE, AND SHOWER PLATE

摘要

A plate with a passage and the like capable of shortening a process time than a previous one and of suppressing leakage from or contamination to the passage are provided. The plate with the passage is a plate in which the passage for causing a fluid to circulate therein is formed, and includes a body plate formed of a metal or an alloy and in which a groove serving as the passage is provided, a cover plate that covers the groove, and a deposition layer that is formed such that metal or alloy powder is accelerated with a gas and is sprayed on the body plate and the cover plate in a solid phase, and covers the cover plate.