发明名称 |
METHOD AND APPARATUS FOR REVIEWING DEFECTS |
摘要 |
Disclosed is a method for reviewing defects in a large number of samples within a short period of time through the use of a defect review apparatus. To collect defect images steadily and at high throughput, a defect detection method is selected before imaging and set up for each of review target defects in the samples in accordance with the external characteristics of the samples that are calculated from the design information about the samples. The defect images are collected after an imaging sequence is set up for the defect images and reference images in such a manner as to reduce the time required for stage movement in accordance with the defect coordinates of the samples and the selected defect detection method.
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申请公布号 |
US2013114881(A1) |
申请公布日期 |
2013.05.09 |
申请号 |
US201213729635 |
申请日期 |
2012.12.28 |
申请人 |
HARADA MINORU;NAKAGAKI RYO;OBARA KENJI;MIYAMOTO ATSUSHI |
发明人 |
HARADA MINORU;NAKAGAKI RYO;OBARA KENJI;MIYAMOTO ATSUSHI |
分类号 |
G06T7/00 |
主分类号 |
G06T7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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