| 摘要 |
An on-demand table model for semiconductor device evaluation is provided. A method of providing on-demand table models for semiconductor device evaluation, includes measuring one or more measurement values of an instance of a semiconductor device. The method further includes providing, by a processor, a table model of the instance for the semiconductor device evaluation upon receiving a request for the semiconductor device evaluation. The method further includes generating a table entry in the table model for the one or more measurement values, the table entry including one or more evaluation values of an evaluation function for the instance.
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