| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently transmit rotation by uniforming a contact state of rollers with the peripheral surface of a carrier surface plate, in a polishing system rotating the carrier surface plate through the rollers. <P>SOLUTION: The carrier surface plate 40 is rotated by a plurality of roller drive units 100 which include roller drive motors 115 for rotatively driving the rollers 110 and roller movement structures 150 for radially moving the rollers, and which are arranged around the carrier surface plate 40. The polishing system includes a radial position detection section 160 that detects the position of the outer peripheral surface 45 of the surface plate passing through an area with the roller drive units 100 arranged when the carrier surface plate 40 is rotated, and is configured such that a control device controls the movement position and rotational speed of the rollers 110 of the roller drive units according to the position of the outer peripheral surface 45 detected by the radial position detection section 160. <P>COPYRIGHT: (C)2013,JPO&INPIT |
