| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate carrying method capable of inspecting a substrate in a short tact time. <P>SOLUTION: A substrate inspection device 1 according to the present invention comprises: a substrate carrying-in part 3 for carrying a substrate to be inspected therein; a substrate inspection part 4 for inspecting the substrate; a substrate carrying-out part 5 for carrying out the substrate that has been inspected; a floating plate 20 for floating the substrate by emitting gas; substrate carrying parts 6, 7 for holding the substrate carried in the substrate carrying-in part 3 and floated by the floating plate 20, and independently moving and carrying it on an independent carrying shaft; and a control part 10 for the substrate carrying parts 6, 7 holding the substrates so that they are not overlaid on each block divided into the substrate carrying-in part 3, the substrate inspection part 4, and the substrate carrying-out part 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
