发明名称 |
ROTATING TYPE THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD USED BY THE SAME |
摘要 |
A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition apparatus are provided. The rotating type thin film deposition apparatus includes a deposition device; a circulation running unit that runs a deposition target on a circulation track via a deposition region of the deposition device; and a support unit that supports the deposition target and moves along the circulation track. Thin layers can be precisely and uniformly formed on the entire surface of a deposition target, and since deposition is performed while a plurality of deposition targets move along a caterpillar track, a working speed is faster compared to a method involving a general reciprocating motion, and the size of the thin film deposition apparatus can be reduced.
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申请公布号 |
US2013115373(A1) |
申请公布日期 |
2013.05.09 |
申请号 |
US201213443268 |
申请日期 |
2012.04.10 |
申请人 |
KIM JIN-KWANG;SEO SANG-JOON;KIM SEUNG-HUN;SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
KIM JIN-KWANG;SEO SANG-JOON;KIM SEUNG-HUN |
分类号 |
C23C16/458 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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