发明名称 ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM AND METHOD OF FORMING PATTERN
摘要 Provided is an actinic-ray- or radiation-sensitive resin composition including (A) a compound that when exposed to actinic rays or radiation, generates an acid, (B) a resin that when acted on by an acid, increases its rate of dissolution in an alkali developer, and (C) a hydrophobic resin, wherein the hydrophobic resin (C) contains a repeating unit derived from any of monomers of general formula (1) below.
申请公布号 US2013115557(A1) 申请公布日期 2013.05.09
申请号 US201113808489 申请日期 2011.09.28
申请人 YAMAGUCHI SHUHEI;SHIBUYA AKINORI;IIZUKA YUSUKE;FUJIFILM CORPORATION 发明人 YAMAGUCHI SHUHEI;SHIBUYA AKINORI;IIZUKA YUSUKE
分类号 G03F7/004 主分类号 G03F7/004
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