| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to form a thin film pattern with high definition. <P>SOLUTION: There is provided a mask 1 for forming a thin film pattern having a fixed shape on a substrate, which comprises a resin film 2 transmitting visible light and a holding member 3 constituted by a plate body in which penetrating openings 5 larger than the thin film pattern are formed in correspondence with a predetermined thin film pattern formation region on the substrate and which holds the film 2, wherein the film 2 has an opening pattern 4 having the same shape as the thin film pattern inside the openings 5 of the holding member 3 in correspondence with the thin film pattern formation region on the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
