| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of obtaining high reliability by secure conduction between an electrode and a connection part inside the chuck. <P>SOLUTION: An electrostatic chuck includes: a ceramic dielectric substrate having a first principal surface for mounting an object to be sucked and a second principal surface on an opposite side to the first principal surface; electrodes interposed between the first principal surface and the second principal surface of the ceramic dielectric substrate; and connection parts connected to the electrodes on the second principal surface side of the electrodes in the ceramic dielectric substrate, and having first regions in contact with the electrodes. When a direction from the first principal surface toward the second principal surface is a first direction, and a direction perpendicular to the first direction is a second direction, in a cross section of the electrode and the connection part when viewed in the second direction, the first region is formed so that an angle on the connection part side of angles formed by an extension line along an outer shape of the electrode on the second principal surface side and a tangent line of an outer shape of the connection part is gradually increased in the first direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
