| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for obtaining a laser speckle image of an object to be measured, which suppress a decrease in image quality of the speckle image caused by material of the object to be measured as much as possible. <P>SOLUTION: A state detection device includes: a light projection unit (10) that projects coherent light toward an observation area (21) of a surface of an object to be measured (20); a light reception unit (30) that receives the coherent light that has been diffused and reflected on the observation area of the surface of the object to be measured; a reflection unit (41) that returns the coherent light that propagates in a direction other than the direction to the light reception unit from the surface of the object to be measured back to the observation area of the surface of the object to be measured; and a detection unit (50) that detects a state of the object to be measured on the basis of a light reception state of the light reception unit. <P>COPYRIGHT: (C)2013,JPO&INPIT |
