| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the occurrence of a failure caused by rapid transmission of heat from a pressure-heating member to a workpiece. <P>SOLUTION: A pressure-heating apparatus 200 includes: the first and second pressure-heating members 56, 52 which pressurize and heat the workpiece, for example a laminate 2, by sandwiching it from both sides; and a lesser heat conductive member 55. The lesser heat conductive member 55 is composed of a material having lower heat conductivity than that of the first pressure-heating member 56 and arranged between the first pressure-heating member 56 and the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT |
