发明名称 GAS SENDING OUT METHOD AND SYSTEM INCLUDING FLOW RATIO CONTROLLER USING MULTIPLE ANTISYMMETRIC OPTIMAL CONTROL PERFORMANCE CONFIGURATION
摘要 <P>PROBLEM TO BE SOLVED: To disclose a multiple antisymmetric optimal (MAO) control algorithm for a gas sending out system including a flow ratio controller for dividing a signal mass flow rate into many flow lines. <P>SOLUTION: In an MAO control algorithm, each flow line is provided with a flow sensor 124 and a valve 126. The valve is positively controlled by an SISO controller combined with a linear saturator to acquire a target flow rate set point. For optimal control performance, the SISO controller and the linear saturator are substantially the same. Each valve control command is evidently multiple antisymmetric to all other valve control commands. Then, in the MAO control algorithm, at least one valve is at an allowable maximum open position at an optional period, which guarantees that an optimal solution is provided about maximum total value conductance about a given set of flow rate set points. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013084287(A) 申请公布日期 2013.05.09
申请号 JP20120269002 申请日期 2012.12.10
申请人 MKS INSTRUMENTS INC 发明人 DING JUNHUA;KAVEH H ZARKAR
分类号 G05B11/36;G05D7/06 主分类号 G05B11/36
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