| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film formation inspection method of a multijunction solar cell. <P>SOLUTION: On the assumption that a solar cell comprises virtual division units arrayed in matrix, three probes 5a, 5b, and 5c are caused to abut with electrodes 103 of the three units in a row direction, for measuring a single cell characteristic of the units and further a connection cell characteristic of the two units connected each other in the row direction is measured by two probes at both ends. As a light source 7, at least n light source units are provided which radiate light of a wavelength for use. Further, arbitrary ones among the n light source units whose light emission intensity is adjustable are used. Single cell measurement and connection cell measurement performed while scanning is made are performed a plurality of times, at a measurement part 5, as light emission layer separation type measurements, under a plurality of conditions in which light emission intensity of arbitrary ones among the plurality of light source units in the light source is adjusted. Further, a determination device determines a film formation state on the basis of the single cell characteristic and the connection cell characteristic provided by the plurality of light emission layer separation type measurements. <P>COPYRIGHT: (C)2013,JPO&INPIT |
