| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a mirror array composed of a micro mirror element capable of carrying out biaxial action, while suppressing the increase in the number of wiring. <P>SOLUTION: A first drive electrode 111 for driving a first moving beam 131 is disposed on a substrate 101 side so as to be opposed to the first moving beam 131. A third drive electrode 113 for driving a second moving beam 141 is disposed on the substrate 101 side so as to be opposed to the second moving beam 141. On the other hand, a second drive electrode 112 for driving a third moving beam 161 is disposed so as to be opposed to the third moving beam 161 on the opposite side to the substrate 101 side, and a fourth drive electrode 114 for driving a fourth moving beam 171 is disposed so as to be opposed to the fourth moving beam 171 on the opposite side to the substrate 101 side. <P>COPYRIGHT: (C)2013,JPO&INPIT |
