发明名称 |
METHOD FOR SEPARATING A PLURALITY OF DIES AND A PROCESSING DEVICE FOR SEPARATING A PLURALITY OF DIES |
摘要 |
A method for separating a plurality of dies is provided, the method including: defining one or more portions to be removed from a carrier including a plurality of dies by chemically changing the properties of the one or more portions to be removed located between the dies; performing a front-end-of-line FEOL process on at least one die to form at least one semiconductor device; and selectively removing the one or more portions of the carrier whose properties were chemically changed for separating the dies along the removed one or more portions.
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申请公布号 |
US2013115757(A1) |
申请公布日期 |
2013.05.09 |
申请号 |
US201113290197 |
申请日期 |
2011.11.07 |
申请人 |
ENGELHARDT MANFRED;FISCHER PETRA;INFINEON TECHNOLOGIES AG |
发明人 |
ENGELHARDT MANFRED;FISCHER PETRA |
分类号 |
H01L21/78;C23F1/08 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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