| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical deflector which is capable of accurately detecting a swing around two axes of a reflecting surface without reducing rotation angles at the time of a swing around two axes of the reflecting surface. <P>SOLUTION: An optical deflector 1 includes: a reflecting surface 2a which is swung around two axes by driving of a first piezoelectric actuator 31 and a second piezoelectric actuator 51; and a first support portion 4 including a first detection part 71y and a second detection part 71x for detecting the swing. A first driving wire Wy conductive to the first piezoelectric actuator 31, second driving wires Wo and We conductive to the second piezoelectric actuator 51, a first detection wire Wmy conductive to the first detection part 71y, a second detection wire Wmx conductive to the second detection part 71x, and first ground wires Wgy are arranged in parallel on the second piezoelectric actuator 51. The first ground wires Wgy are disposed between the first driving wire Wy and the second driving wires Wo and We and between the first detection wire Wmy and the second detection wire Wmx. <P>COPYRIGHT: (C)2013,JPO&INPIT |
