| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL display device capable of manufacturing an organic EL display device with high efficiency, high definition, and a long service life at low cost. <P>SOLUTION: A manufacturing method of an organic EL display device comprises the steps of: forming organic compound layers 12, 13a, 19, and 14 including at least a low-molecular organic EL material; forming intermediate layers 21 and 22 on the organic compound layers; forming a resist layer 23 on the intermediate layers; irradiating the resist layer 23 with ultraviolet light via a photomask having a pattern-like light-shielding part and partly removing the resist layer in the region irradiated with ultraviolet light; and removing the organic compound layer in the region from which the resist layer was removed. The resist layer 23 is composed of a positive resist. The intermediate layers include a layer 21 composed of a high-molecular organic material selectively dissolvable in a solvent which does not dissolve the organic compound layer and having a chain structure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
