| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method that can determine pattern contours and dimensions with high precision even if an object to be measured shrinks due to electron beam radiations. <P>SOLUTION: A method, which performs measurements by radiating an electron beam onto a sample having a pattern formed on a primary coating thereof, prepares an SEM image and contour of the pattern (S201, S202), material parameters of the pattern part and primary coating part of the sample (S203, S204), and a beam condition in radiating the electron beam onto the sample (S205), and uses these prepared things to calculate a pattern shape or dimensions before the radiation of the electron beam (S206). <P>COPYRIGHT: (C)2013,JPO&INPIT |
