发明名称 OPTICAL MEMBER MADE OF FLUORIDE CRYSTAL MOLDED ARTICLE, OPTICAL DEVICE HAVING OPTICAL MEMBER, AND ULTRAVIOLET CLEANING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a fluoride crystal molded article which has a different shape from that of a fluoride crystal base and has excellent optical properties. <P>SOLUTION: An optical member made of the fluoride crystal molded article has light transmittance per 10 mm thickness at a wavelength of 172 nm is 90% or more and at least an area of a cross section in one direction is 350&times;350 mm or more. The light transmittance per 10 mm thickness at a wavelength of 146 nm is 85% or more. Further, the light transmittance per 10 mm thickness at a wavelength of 126 nm is 65% or more. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013082620(A) 申请公布日期 2013.05.09
申请号 JP20120283977 申请日期 2012.12.27
申请人 NIKON CORP 发明人 AZUMI MINAKO
分类号 C30B29/12;G02B1/02 主分类号 C30B29/12
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