| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve frequency temperature characteristics, and also to reduce propagation loss of an acoustic wave. <P>SOLUTION: The acoustic wave device comprises an interdigital electrode 12 provided on a piezoelectric substrate 10, and an SiOF film 16 provided on the piezoelectric substrate 10 so as to cover the interdigital electrode 12. Normalization reflectance which is obtained by normalizing a maximum value of the reflectance obtained when light is made to be incident on the top face of the SiOF film 16 by the reflectance obtained when the light of a wavelength at the maximum value is made to be incident directly on the top face of the piezoelectric substrate 10, is 0.96 or more. <P>COPYRIGHT: (C)2013,JPO&INPIT |
