| 摘要 |
A method and apparatus for determining planar impedance tomography of a sample comprising a measurement head unit comprising an impedance sensor; a three-axis actuator assembly, coupled to the measurement head unit, for positioning the impedance sensor relative to a sample; a controller, coupled to the three-axis actuator assembly, for controlling the three-axis actuator assembly to position the impedance sensor at a plurality of locations relative to the sample; and an impedance analyzer, coupled to the impedance sensor, for determining an impedance value at each location in the plurality of locations.
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