发明名称 Gripper
摘要 A gripper applied in a transport mechanism for transporting a wafer is provided. The transport mechanism includes a bar. The gripper includes a fixing member fixed to the bar, and a carrying member. The fixing member includes two grooves adjacent to the bottom of the fixing member. Each groove includes an entrance and a retaining portion. The carrying member includes a notch and a first claw. The notch is located at the top of the carrying member and communicates two opposite sides of the carrying member. The notch includes two inner walls, each having a protrusion. The carrying member is assembled to the fixing member by sliding each protrusion along one of the grooves from the corresponding entrance and until abutting against the corresponding retaining portion. The first claw is located at a first sidewall of the carrying member. The edge of the wafer is supportable by the first claw.
申请公布号 EP2590209(A1) 申请公布日期 2013.05.08
申请号 EP20110187417 申请日期 2011.11.01
申请人 GINTECH ENERGY CORPORATION 发明人 HSIUNG, WILLIAM;LO, SHIH-CHUN;LIN, TONY
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
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