Facet mirror e.g. field facet mirror, for channel-wise reflection of light radiation in UV micro-lithographic projection exposure system, has displaceable micro mirrors whose facet reflecting surfaces exhibit specific area

摘要

The mirror e.g. field facet mirror (19), has a set of simple facets (38e) and a set of composite facets (38z) comprising two sets of facet reflecting surfaces, respectively. The facet reflecting surfaces of the composite facets are assembled to a set of single reflecting surfaces of displaceable micro mirrors (28). Facet reflecting surfaces of the simple facets and the single reflecting surfaces of the displaceable micro mirrors exhibit areas of about 10 and 5 square mm, respectively, where number of simple facets lies within a range of 20-1000. Independent claims are also included for the following: (1) a lighting system (2) a method for lighting an object field (3) an optical system (4) a method for manufacturing a micro or nano-structured component.